Nanoparticle engineering for chemical mechanical planarization fabrication of next generation nanodevices kindle edition by paik ungyu park jea gun download it once and read it on your kindle device pc phones or tablets use features like bookmarks note taking and highlighting while reading nanoparticle engineering for chemical mechanical planarization fabrication of next generation . Nanoparticle engineering for chemical mechanical planarization fabrication of next generation nanodevices by ungyu paik and jea gun park abstract increasing reliance on electronic devices demands products with high performance and efficiency such devices can be realized through the advent of nanoparticle technology this book explains the physicochemical properties of nanoparticles . Nanoparticle engineering for chemical mechanical planarization fabrication of next generation nanodevices ungyu paik jea gun park in the development of next generation nanoscale devices higher speed and lower power operation is the name of the game increasing reliance on mobile computers mobile phone and other electronic. The authors provide a detailed guide to nanoparticle engineering of novel cmp slurry for next generation nanoscale devices below the 60nm design rule they present design techniques using polymeric additives to improve cmp performance the final chapter focuses on novel cmp slurry for the application to memory devices beyond 50nm technology. Nanoparticle engineering for chemical mechanical planarization fabrication of next generation nanodevices ungyu paik jea gun park increasing reliance on electronic devices demands products with high performance and efficiency such devices can be realized through the advent of nanoparticle technology this book explains the